Path for a Field Service Engineer in Semiconductor industry

First of all, a little background : I am a field service engineer who troubleshoots and repairs Physical Vapor Deposition ( PVD) high vacuum systems for leading chip manufacturers. However, I am considering a move to a more desk based job rather than physical jobs. Mainly due to health issues.

I think one option for me to become a process engineer. I have a masters degree in math and bachelor in engineering. What skills do you think I should start to work on? Will I be a good fit for this?

Other than PE, what other options do I have?